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Deformation in Mono-Crystalline Silicon Caused by High Speed Single-Point Micro-Cutting
Deformation in Mono-Crystalline Silicon Caused by High Speed Single-Point Micro-Cutting
Deformation in Mono-Crystalline Silicon Caused by High Speed Single-Point Micro-Cutting
Biddut, A.Q. (author) / Yan, J.W. (author) / Zhang, L.C. (author) / Ohta, T. (author) / Kuriyagawa, T. (author) / Shaun, B. (author) / Rui, F. / Lihong, Q. / Huawei, C. / Akio, O.
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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