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Wedge indentation studies of low-k films at inert, water and ambient environments

Yeap, K. B. / Zeng, K. / Chi, D.

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Wedge indentation studies of low-k films at inert, water and ambient environments

Yeap, K. B. / Zeng, K. / Chi, D.

Wedge indentation studies of low-k films at inert, water and ambient environments

Yeap, K. B. / Zeng, K. / Chi, D.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Wedge indentation studies of low-k films at inert, water and ambient environments

Contributors:

Yeap, K. B. (author) / Zeng, K. (author) / Chi, D. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING A ; 518 ; 132-138

Publication date:

2009-01-01

Size:

7 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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