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Optical properties of pulse laser deposited AlN thin films on silicon

Chale-Lara, F. / Farias, M. H. / Huerta-Escamilla, C. / Xiao, M.

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Optical properties of pulse laser deposited AlN thin films on silicon

Chale-Lara, F. / Farias, M. H. / Huerta-Escamilla, C. / Xiao, M.

Optical properties of pulse laser deposited AlN thin films on silicon

Chale-Lara, F. / Farias, M. H. / Huerta-Escamilla, C. / Xiao, M.

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Order at Subito €

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Document information

Title:

Optical properties of pulse laser deposited AlN thin films on silicon

Contributors:

Chale-Lara, F. (author) / Farias, M. H. (author) / Huerta-Escamilla, C. (author) / Xiao, M. (author)

Published in:

MATERIALS LETTERS ; 63 ; 2093-2096

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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