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Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Muralt, P. / Polcawich, R.G. / Trolier-McKinstry, S.

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Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Muralt, P. / Polcawich, R.G. / Trolier-McKinstry, S.

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Muralt, P. / Polcawich, R.G. / Trolier-McKinstry, S.

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Document information

Title:

Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting

Contributors:

Muralt, P. (author) / Polcawich, R.G. (author) / Trolier-McKinstry, S. (author)

Published in:

ELECTROMECHANICS ON THE NANOMETER SCALE ; 658-664

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 34

Publication date:

2009-01-01

Size:

7 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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