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Quantification of a Ti(CxN1-x) based multilayer by Auger Electron Spectroscopy
Quantification of a Ti(CxN1-x) based multilayer by Auger Electron Spectroscopy
Quantification of a Ti(CxN1-x) based multilayer by Auger Electron Spectroscopy
Guillot, J. (author) / Wirtz, T. (author) / Girot, T. (author) / Penoy, M. (author) / Migeon, H. N. (author) / Barbier, G. (author)
APPLIED SURFACE SCIENCE ; 256 ; 773-778
2009-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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