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    Sol-gel ZrO2 and ZrO2-Al2O3 nanocrystalline thin films on Si as high-k dielectrics

    New search for: Vitanov, P.
    New search for: Harizanova, A.
    New search for: Ivanova, T.
    New search for: Trapalis, C.
    New search for: Todorova, N.

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    Sol-gel ZrO2 and ZrO2-Al2O3 nanocrystalline thin films on Si as high-k dielectrics

    New search for: Vitanov, P.
    New search for: Harizanova, A.
    New search for: Ivanova, T.
    New search for: Trapalis, C.
    New search for: Todorova, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Sol-gel ZrO2 and ZrO2-Al2O3 nanocrystalline thin films on Si as high-k dielectrics

    New search for: Vitanov, P.
    New search for: Harizanova, A.
    New search for: Ivanova, T.
    New search for: Trapalis, C.
    New search for: Todorova, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Sol-gel ZrO2 and ZrO2-Al2O3 nanocrystalline thin films on Si as high-k dielectrics

    Contributors:

    Vitanov, P. (author) / Harizanova, A. (author) / Ivanova, T. (author) / Trapalis, C. (author) / Todorova, N. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 165 ; 178-181

    Publication date:

    2009-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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