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Fabrication of Advanced Functional Devices Combining Soft Chemistry with X-ray Lithography in One Step
Fabrication of Advanced Functional Devices Combining Soft Chemistry with X-ray Lithography in One Step
Fabrication of Advanced Functional Devices Combining Soft Chemistry with X-ray Lithography in One Step
Falcaro, P. (author) / Malfatti, L. (author) / Vaccari, L. (author) / Amenitsch, H. (author) / Marmiroli, B. (author) / Grenci, G. (author) / Innocenzi, P. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 21 ; 4932-4936
2009-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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