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    Generation and removal of pits during chemical mechanical polishing process for MgO single crystal substrate

    New search for: Wang, K.
    New search for: Li, Y. Z.
    New search for: Kang, R. K.
    New search for: Guo, D. M.

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    Generation and removal of pits during chemical mechanical polishing process for MgO single crystal substrate

    New search for: Wang, K.
    New search for: Li, Y. Z.
    New search for: Kang, R. K.
    New search for: Guo, D. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Generation and removal of pits during chemical mechanical polishing process for MgO single crystal substrate

    New search for: Wang, K.
    New search for: Li, Y. Z.
    New search for: Kang, R. K.
    New search for: Guo, D. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Generation and removal of pits during chemical mechanical polishing process for MgO single crystal substrate

    Contributors:

    Wang, K. (author) / Li, Y. Z. (author) / Kang, R. K. (author) / Guo, D. M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 256 ; 2691-2699

    Publication date:

    2010-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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