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Fabrication of ZnO Nanopillars by Atomic Layer Deposition

Wu, M.-K. / Chen, M.-J. / Tsai, F.-Y. / Yang, J.-R. / Shiojiri, M.

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Fabrication of ZnO Nanopillars by Atomic Layer Deposition

Wu, M.-K. / Chen, M.-J. / Tsai, F.-Y. / Yang, J.-R. / Shiojiri, M.

Fabrication of ZnO Nanopillars by Atomic Layer Deposition

Wu, M.-K. / Chen, M.-J. / Tsai, F.-Y. / Yang, J.-R. / Shiojiri, M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Fabrication of ZnO Nanopillars by Atomic Layer Deposition

Contributors:

Wu, M.-K. (author) / Chen, M.-J. (author) / Tsai, F.-Y. (author) / Yang, J.-R. (author) / Shiojiri, M. (author)

Published in:

MATERIALS TRANSACTIONS ; 51 ; 253-255

Publication date:

2010-01-01

Size:

3 pages

ISSN:

1345-9678

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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