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    Effect of ambient gas on structural and optical properties of titanium oxynitride films

    New search for: Rawal, S. K.
    New search for: Chawla, A. K.
    New search for: Chawla, V.
    New search for: Jayaganthan, R.
    New search for: Chandra, R.

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    Effect of ambient gas on structural and optical properties of titanium oxynitride films

    New search for: Rawal, S. K.
    New search for: Chawla, A. K.
    New search for: Chawla, V.
    New search for: Jayaganthan, R.
    New search for: Chandra, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of ambient gas on structural and optical properties of titanium oxynitride films

    New search for: Rawal, S. K.
    New search for: Chawla, A. K.
    New search for: Chawla, V.
    New search for: Jayaganthan, R.
    New search for: Chandra, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of ambient gas on structural and optical properties of titanium oxynitride films

    Contributors:

    Rawal, S. K. (author) / Chawla, A. K. (author) / Chawla, V. (author) / Jayaganthan, R. (author) / Chandra, R. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 256 ; 4129-4135

    Publication date:

    2010-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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