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Effect of ambient gas on structural and optical properties of titanium oxynitride films
Effect of ambient gas on structural and optical properties of titanium oxynitride films
Effect of ambient gas on structural and optical properties of titanium oxynitride films
Rawal, S. K. (author) / Chawla, A. K. (author) / Chawla, V. (author) / Jayaganthan, R. (author) / Chandra, R. (author)
APPLIED SURFACE SCIENCE ; 256 ; 4129-4135
2010-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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