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High Quality 100mm 4H-SiC Substrates with Low Resistivity
High Quality 100mm 4H-SiC Substrates with Low Resistivity
High Quality 100mm 4H-SiC Substrates with Low Resistivity
Straubinger, T.L. (author) / Schmitt, E. (author) / Storm, S. (author) / Vogel, M. (author) / Weber, A.D. (author) / Wohlfart, A. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G.
2010-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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