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Interstitial diffusion under conditions of trapping of interstitial impurity atoms

Velichko, O. I. / Shaman, Y. P.

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Interstitial diffusion under conditions of trapping of interstitial impurity atoms

Velichko, O. I. / Shaman, Y. P.

Interstitial diffusion under conditions of trapping of interstitial impurity atoms

Velichko, O. I. / Shaman, Y. P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Interstitial diffusion under conditions of trapping of interstitial impurity atoms

Contributors:

Velichko, O. I. (author) / Shaman, Y. P. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 13 ; 13-20

Publication date:

2010-01-01

Size:

8 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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