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Numerical investigation on atomic oxygen undercutting of the protective polymer film using Monte Carlo approach

Liu, Y. / Liu, X. / Li, G. / Li, T.

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Numerical investigation on atomic oxygen undercutting of the protective polymer film using Monte Carlo approach

Liu, Y. / Liu, X. / Li, G. / Li, T.

Numerical investigation on atomic oxygen undercutting of the protective polymer film using Monte Carlo approach

Liu, Y. / Liu, X. / Li, G. / Li, T.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Numerical investigation on atomic oxygen undercutting of the protective polymer film using Monte Carlo approach

Contributors:

Liu, Y. (author) / Liu, X. (author) / Li, G. (author) / Li, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 6096-6106

Publication date:

2010-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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