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Measurement of Straightness for Two-Dimensional Translatory Stage

Furutani, R. / Watanabe, M.

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Measurement of Straightness for Two-Dimensional Translatory Stage

Furutani, R. / Watanabe, M.

Measurement of Straightness for Two-Dimensional Translatory Stage

Furutani, R. / Watanabe, M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Measurement of Straightness for Two-Dimensional Translatory Stage

Contributors:

Furutani, R. (author) / Watanabe, M. (author) / Chugui, Y. / Gao, Y. / Fan, K.-C. / Taymanov, R. / Sapozhnikova, K.

Published in:

Measurement Technology and Intelligent Instruments IX ; 194-197

KEY ENGINEERING MATERIALS ; 437

Publication date:

2010-01-01

Size:

4 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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