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Synchrotron radiation photoelectron spectroscopy and near-edge X-ray absorption fine structure study on oxidative etching of diamond-like carbon films by hyperthermal atomic oxygen
Synchrotron radiation photoelectron spectroscopy and near-edge X-ray absorption fine structure study on oxidative etching of diamond-like carbon films by hyperthermal atomic oxygen
Synchrotron radiation photoelectron spectroscopy and near-edge X-ray absorption fine structure study on oxidative etching of diamond-like carbon films by hyperthermal atomic oxygen
Tagawa, M. (author) / Yokota, K. (author) / Kitamura, A. (author) / Matsumoto, K. (author) / Yoshigoe, A. (author) / Teraoka, Y. (author) / Kanda, K. (author) / Niibe, M. (author)
APPLIED SURFACE SCIENCE ; 256 ; 7678-7683
2010-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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