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Micro-ablation on silicon by femtosecond laser pulses focused with an axicon assisted with a lens
Micro-ablation on silicon by femtosecond laser pulses focused with an axicon assisted with a lens
Micro-ablation on silicon by femtosecond laser pulses focused with an axicon assisted with a lens
Inoue, R. (author) / Takakusaki, K. (author) / Takagi, Y. (author) / Yagi, T. (author)
APPLIED SURFACE SCIENCE ; 257 ; 476-480
2010-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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