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    The Materials Challenge in Diffraction-Unlimited Direct-Laser-Writing Optical Lithography

    New search for: Fischer, J.
    New search for: von Freymann, G.
    New search for: Wegener, M.

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    The Materials Challenge in Diffraction-Unlimited Direct-Laser-Writing Optical Lithography

    New search for: Fischer, J.
    New search for: von Freymann, G.
    New search for: Wegener, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The Materials Challenge in Diffraction-Unlimited Direct-Laser-Writing Optical Lithography

    New search for: Fischer, J.
    New search for: von Freymann, G.
    New search for: Wegener, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    The Materials Challenge in Diffraction-Unlimited Direct-Laser-Writing Optical Lithography

    Contributors:

    Fischer, J. (author) / von Freymann, G. (author) / Wegener, M. (author)

    Published in:

    ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 22 ; 3578-3582

    Publication date:

    2010-01-01

    Size:

    5 pages

    ISSN:

    0935-9648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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