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ITO Films Prepared by Long-throw Magnetron Sputtering without Oxygen Partial Pressure
ITO Films Prepared by Long-throw Magnetron Sputtering without Oxygen Partial Pressure
ITO Films Prepared by Long-throw Magnetron Sputtering without Oxygen Partial Pressure
Chuang, M. (author)
JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 26 ; 577-583
2010-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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