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Comparison of Bonding of Bulk PZT to Silicon by Intermediate Glass Layer and by Intermediate Au Layer
Comparison of Bonding of Bulk PZT to Silicon by Intermediate Glass Layer and by Intermediate Au Layer
Comparison of Bonding of Bulk PZT to Silicon by Intermediate Glass Layer and by Intermediate Au Layer
Sun, J. (author) / Li, Y.G. (author) / Liu, J.Q. (author) / Yang, C.S. (author) / He, D.N. (author) / Van, T.D. (author) / Tanaka, K. (author) / Sugiyama, S. (author) / Huang, Y.M.
2011-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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