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    Effect of surface roughness and release layer on anti-adhesion performance of the imprint template

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    Effect of surface roughness and release layer on anti-adhesion performance of the imprint template

    New search for: Duan, Y.
    New search for: Li, Y.
    New search for: Ding, Y.
    New search for: Li, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of surface roughness and release layer on anti-adhesion performance of the imprint template

    New search for: Duan, Y.
    New search for: Li, Y.
    New search for: Ding, Y.
    New search for: Li, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Effect of surface roughness and release layer on anti-adhesion performance of the imprint template

    Contributors:

    Duan, Y. (author) / Li, Y. (author) / Ding, Y. (author) / Li, D. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 3220-3225

    Publication date:

    2011-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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