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Nanostructures and Functional Materials Fabricated by Interferometric Lithography
Nanostructures and Functional Materials Fabricated by Interferometric Lithography
Nanostructures and Functional Materials Fabricated by Interferometric Lithography
Xia, D. (author) / Ku, Z. (author) / Lee, S. C. (author) / Brueck, S. R. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 23 ; 147-179
2011-01-01
33 pages
Article (Journal)
English
DDC:
620.11
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