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The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
Isarakorn, D. (author) / Briand, D. (author) / Janphuang, P. (author) / Sambri, A. (author) / Gariglio, S. (author) / Triscone, J.-M. (author) / Guy, F. (author) / Reiner, J.W. (author) / Ahn, C.H. (author) / de Rooij, N.F. (author)
SMART MATERIALS AND STRUCTURES ; 20 ; 025015
2011-01-01
25015 pages
Article (Journal)
English
DDC:
530
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