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Preparation of silicon oxycarbide films by laser ablation of SiO/3C-SiC multicomponent targets
Preparation of silicon oxycarbide films by laser ablation of SiO/3C-SiC multicomponent targets
Preparation of silicon oxycarbide films by laser ablation of SiO/3C-SiC multicomponent targets
Wang, C. B. (author) / Goto, T. (author) / Tu, R. (author) / Zhang, L. M. (author)
APPLIED SURFACE SCIENCE ; 257 ; 1703-1706
2010-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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