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    Effect of substrate bias and temperature on magnetron sputtered CrSiN films

    New search for: Tan, S.
    New search for: Zhang, X.
    New search for: Wu, X.
    New search for: Fang, F.
    New search for: Jiang, J.

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    Effect of substrate bias and temperature on magnetron sputtered CrSiN films

    New search for: Tan, S.
    New search for: Zhang, X.
    New search for: Wu, X.
    New search for: Fang, F.
    New search for: Jiang, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of substrate bias and temperature on magnetron sputtered CrSiN films

    New search for: Tan, S.
    New search for: Zhang, X.
    New search for: Wu, X.
    New search for: Fang, F.
    New search for: Jiang, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of substrate bias and temperature on magnetron sputtered CrSiN films

    Contributors:

    Tan, S. (author) / Zhang, X. (author) / Wu, X. (author) / Fang, F. (author) / Jiang, J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 1850-1853

    Publication date:

    2011-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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