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The influence of substrate etched on the quality of GaN epilayers

Mei, J. / Xie, X. / Hao, Q. / Jing, W. / Liu, C.

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The influence of substrate etched on the quality of GaN epilayers

Mei, J. / Xie, X. / Hao, Q. / Jing, W. / Liu, C.

The influence of substrate etched on the quality of GaN epilayers

Mei, J. / Xie, X. / Hao, Q. / Jing, W. / Liu, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

The influence of substrate etched on the quality of GaN epilayers

Contributors:

Mei, J. (author) / Xie, X. (author) / Hao, Q. (author) / Jing, W. (author) / Liu, C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 257 ; 7217-7220

Publication date:

2011-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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