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    On-Line Monitoring of Run-to-Run Control Performance in a Discrete Microelectronics Manufacturing

    New search for: Chen, L.
    New search for: Chen, L.
    New search for: Zhang, Y.
    New search for: Feng, A.
    New search for: Xu, Z.
    New search for: Li, B.
    New search for: Shen, H.

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    On-Line Monitoring of Run-to-Run Control Performance in a Discrete Microelectronics Manufacturing

    New search for: Chen, L.
    New search for: Chen, L.
    New search for: Zhang, Y.
    New search for: Feng, A.
    New search for: Xu, Z.
    New search for: Li, B.
    New search for: Shen, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    On-Line Monitoring of Run-to-Run Control Performance in a Discrete Microelectronics Manufacturing

    New search for: Chen, L.
    New search for: Chen, L.
    New search for: Zhang, Y.
    New search for: Feng, A.
    New search for: Xu, Z.
    New search for: Li, B.
    New search for: Shen, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    On-Line Monitoring of Run-to-Run Control Performance in a Discrete Microelectronics Manufacturing

    Contributors:

    Chen, L. (author) / Chen, L. / Zhang, Y. / Feng, A. / Xu, Z. / Li, B. / Shen, H.

    Published in:

    Functional Manufacturing Technologies and Ceeusro II ; 133-137

    KEY ENGINEERING MATERIALS ; 464

    Publication date:

    2011-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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