On the ``Step Bunching'' Phenomena Observed on Etched and Hemoepitaxially Grown 4H Silicon Carbide: Fid-Bau Portal

On the ``Step Bunching'' Phenomena Observed on Etched and Hemoepitaxially Grown 4H Silicon Carbide

Camarda, M. / Severino, A. / Fiorenza, P. / Raineri, V. / Scalese, S. / Bongiorno, C. / La Magna, A. / La Via, F. / Mauceri, M. / Crippa, D.

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On the ``Step Bunching'' Phenomena Observed on Etched and Hemoepitaxially Grown 4H Silicon Carbide

Camarda, M. / Severino, A. / Fiorenza, P. / Raineri, V. / Scalese, S. / Bongiorno, C. / La Magna, A. / La Via, F. / Mauceri, M. / Crippa, D.

On the ``Step Bunching'' Phenomena Observed on Etched and Hemoepitaxially Grown 4H Silicon Carbide

Camarda, M. / Severino, A. / Fiorenza, P. / Raineri, V. / Scalese, S. / Bongiorno, C. / La Magna, A. / La Via, F. / Mauceri, M. / Crippa, D.

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Title:

On the ``Step Bunching'' Phenomena Observed on Etched and Hemoepitaxially Grown 4H Silicon Carbide

Contributors:

Camarda, M. (author) / Severino, A. (author) / Fiorenza, P. (author) / Raineri, V. (author) / Scalese, S. (author) / Bongiorno, C. (author) / La Magna, A. (author) / La Via, F. (author) / Mauceri, M. (author) / Crippa, D. (author)

Published in:

Silicon Carbide and Related Materials 2010 ; 358-361

MATERIALS SCIENCE FORUM ; 679/680

Publication date:

2011-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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