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Nano-Surface Modification of Silicon with Ultra-Short Pulse Laser Process

Setsuhara, Y. / Hashida, M.

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Nano-Surface Modification of Silicon with Ultra-Short Pulse Laser Process

Setsuhara, Y. / Hashida, M.

Nano-Surface Modification of Silicon with Ultra-Short Pulse Laser Process

Setsuhara, Y. / Hashida, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Nano-Surface Modification of Silicon with Ultra-Short Pulse Laser Process

Contributors:

Setsuhara, Y. (author) / Hashida, M. (author) / Miyazaki, S. / Tabata, H.

Published in:

Technology Evolution for Silicon Nano-Electronics ; 117-122

KEY ENGINEERING MATERIALS ; 470

Publication date:

2011-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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