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MEMS-based high-frequency vibration sensors
MEMS-based high-frequency vibration sensors
MEMS-based high-frequency vibration sensors
Harris, A.W. (author) / Oppenheim, I.J. (author) / Greve, D.W. (author)
SMART MATERIALS AND STRUCTURES ; 20 ; 075018
2011-01-01
75018 pages
Article (Journal)
English
DDC:
530
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