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Carbon nitride film deposition by active screen plasma nitriding

Crespi, A. E. / Maia da Costa, M. E. / Figueroa, C. A. / Dotto, M. E. / Kauling, A. P. / Soares, G. V. / Baumvol, I. J. / Giacomelli, C.

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Carbon nitride film deposition by active screen plasma nitriding

Crespi, A. E. / Maia da Costa, M. E. / Figueroa, C. A. / Dotto, M. E. / Kauling, A. P. / Soares, G. V. / Baumvol, I. J. / Giacomelli, C.

Carbon nitride film deposition by active screen plasma nitriding

Crespi, A. E. / Maia da Costa, M. E. / Figueroa, C. A. / Dotto, M. E. / Kauling, A. P. / Soares, G. V. / Baumvol, I. J. / Giacomelli, C.

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Title:

Carbon nitride film deposition by active screen plasma nitriding

Contributors:

Crespi, A. E. (author) / Maia da Costa, M. E. (author) / Figueroa, C. A. (author) / Dotto, M. E. (author) / Kauling, A. P. (author) / Soares, G. V. (author) / Baumvol, I. J. (author) / Giacomelli, C. (author)

Published in:

MATERIALS LETTERS ; 65 ; 2985-2988

Publication date:

2011-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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