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Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing

Eun, Y. / Lee, J. I. / Choi, J. / Song, Y. / Kim, J.

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Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing

Eun, Y. / Lee, J. I. / Choi, J. / Song, Y. / Kim, J.

Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing

Eun, Y. / Lee, J. I. / Choi, J. / Song, Y. / Kim, J.

Access

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Check availability in my library

Order at Subito €

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Document information

Title:

Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing

Contributors:

Eun, Y. (author) / Lee, J. I. (author) / Choi, J. (author) / Song, Y. (author) / Kim, J. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 23 ; 4285-4289

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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