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Resistivity of Thin Films of MoSi~2-Si Composites

Hikita, S. / Hayashi, T. / Sato, Y. / Yoshikado, S.

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Resistivity of Thin Films of MoSi~2-Si Composites

Hikita, S. / Hayashi, T. / Sato, Y. / Yoshikado, S.

Resistivity of Thin Films of MoSi~2-Si Composites

Hikita, S. / Hayashi, T. / Sato, Y. / Yoshikado, S.

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Title:

Resistivity of Thin Films of MoSi~2-Si Composites

Contributors:

Hikita, S. (author) / Hayashi, T. (author) / Sato, Y. (author) / Yoshikado, S. (author) / Shinozaki, K. / Fujihara, S. / Chazono, H.

Published in:

Electroceramics in Japan XIV Selected, peer reviewed papers from the 30^t^h Electronics Division Meeting of the Ceramic Society of Japan, October 29-30, 2010, Tokyo, Japan ; 265-270

KEY ENGINEERING MATERIALS ; 485

Publication date:

2011-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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