Multipulse irradiation of silicon by femtosecond laser pulses: Variation of surface morphology: Fid-Bau Portal

Multipulse irradiation of silicon by femtosecond laser pulses: Variation of surface morphology

Lugomer, S. / Maksimovic, A. / Farkas, B. / Geretovszky, Z. / Szorenyi, T. / Toth, A. L. / Zolnai, Z. / Barsony, I.

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Multipulse irradiation of silicon by femtosecond laser pulses: Variation of surface morphology

Lugomer, S. / Maksimovic, A. / Farkas, B. / Geretovszky, Z. / Szorenyi, T. / Toth, A. L. / Zolnai, Z. / Barsony, I.

Multipulse irradiation of silicon by femtosecond laser pulses: Variation of surface morphology

Lugomer, S. / Maksimovic, A. / Farkas, B. / Geretovszky, Z. / Szorenyi, T. / Toth, A. L. / Zolnai, Z. / Barsony, I.

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Title:

Multipulse irradiation of silicon by femtosecond laser pulses: Variation of surface morphology

Contributors:

Lugomer, S. (author) / Maksimovic, A. (author) / Farkas, B. (author) / Geretovszky, Z. (author) / Szorenyi, T. (author) / Toth, A. L. (author) / Zolnai, Z. (author) / Barsony, I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 3589-3597

Publication date:

2012-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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