Characterization and properties of amorphous carbon coatings prepared by middle frequency pulsed unbalanced magnetron sputtering at different substrate bias: Fid-Bau Portal

Characterization and properties of amorphous carbon coatings prepared by middle frequency pulsed unbalanced magnetron sputtering at different substrate bias

Dai, H. Y. / Wang, Y. Q. / Cheng, X. R. / Zhan, C. Y. / Huang, N. K.

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Characterization and properties of amorphous carbon coatings prepared by middle frequency pulsed unbalanced magnetron sputtering at different substrate bias

Dai, H. Y. / Wang, Y. Q. / Cheng, X. R. / Zhan, C. Y. / Huang, N. K.

Characterization and properties of amorphous carbon coatings prepared by middle frequency pulsed unbalanced magnetron sputtering at different substrate bias

Dai, H. Y. / Wang, Y. Q. / Cheng, X. R. / Zhan, C. Y. / Huang, N. K.

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Check availability in my library

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Document information

Title:

Characterization and properties of amorphous carbon coatings prepared by middle frequency pulsed unbalanced magnetron sputtering at different substrate bias

Contributors:

Dai, H. Y. (author) / Wang, Y. Q. (author) / Cheng, X. R. (author) / Zhan, C. Y. (author) / Huang, N. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 5462-5466

Publication date:

2012-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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