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Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology
Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology
Two Fabrication Schematics of Silicon Micro Perforated Panel Based on MEMS Technology
Wu, S.H. (author) / Zhao, Z. (author) / Guo, L.J. (author) / Du, L.D. (author) / Xiao, L. (author) / Fang, Z. (author) / Zhao, J.J. (author) / Xuan, Y.D. (author) / Wang, X.
2012-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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