Influence of RF power on structure and electrical properties of sputtered SrHfON thin films: Fid-Bau Portal

Influence of RF power on structure and electrical properties of sputtered SrHfON thin films

Feng, L. p. / Liu, Z. t. / Tian, H. / Liu, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Influence of RF power on structure and electrical properties of sputtered SrHfON thin films

Feng, L. p. / Liu, Z. t. / Tian, H. / Liu, L.

Influence of RF power on structure and electrical properties of sputtered SrHfON thin films

Feng, L. p. / Liu, Z. t. / Tian, H. / Liu, L.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Influence of RF power on structure and electrical properties of sputtered SrHfON thin films

Contributors:

Feng, L. p. (author) / Liu, Z. t. (author) / Tian, H. (author) / Liu, L. (author)

Published in:

MATERIALS LETTERS ; 78 ; 66-68

Publication date:

2012-01-01

Size:

3 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

Rao, K. J. / Benqlilou-Moudden, H. / Couturier, G. et al. | British Library Online Contents | 2002

Influence of sputtering power on composition, structure and electrical properties of RF sputtered CuIn1-xGaxSe2 thin films

Yu, Z. / Yan, C. / Huang, T. et al. | British Library Online Contents | 2012

Electrical properties of sputtered MnO~2 thin films

Fau, P. / Bonino, J. P. / Rousset, A. | British Library Online Contents | 1994

Electrical properties of thin rf sputtered aluminum oxide films

Voigt, M. / Sokolowski, M. | British Library Online Contents | 2004

Structural and electrical properties of TiO2 RF sputtered thin films

Mardare, D. / Rusu, G. I. | British Library Online Contents | 2000