Microstructuring and doping of silicon with nanosecond laser pulses: Fid-Bau Portal

Microstructuring and doping of silicon with nanosecond laser pulses

Li, X. / Chang, L. / Qiu, R. / Wen, C. / Li, Z. / Hu, S.

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Microstructuring and doping of silicon with nanosecond laser pulses

Li, X. / Chang, L. / Qiu, R. / Wen, C. / Li, Z. / Hu, S.

Microstructuring and doping of silicon with nanosecond laser pulses

Li, X. / Chang, L. / Qiu, R. / Wen, C. / Li, Z. / Hu, S.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Microstructuring and doping of silicon with nanosecond laser pulses

Contributors:

Li, X. (author) / Chang, L. (author) / Qiu, R. (author) / Wen, C. (author) / Li, Z. (author) / Hu, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 8002-8007

Publication date:

2012-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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