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The effect of Si substrate preparation on surface morphology and surface composition of In2O3 ultrathin films deposited by rheotaxial growth and vacuum oxidation
The effect of Si substrate preparation on surface morphology and surface composition of In2O3 ultrathin films deposited by rheotaxial growth and vacuum oxidation
The effect of Si substrate preparation on surface morphology and surface composition of In2O3 ultrathin films deposited by rheotaxial growth and vacuum oxidation
Koscielniak, P. (author) / Sitarz, M. (author) / Maciak, E. (author) / Szuber, J. (author)
APPLIED SURFACE SCIENCE ; 258 ; 8419-8424
2012-01-01
6 pages
Article (Journal)
English
DDC:
621.35
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