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Atomic force microscopy based repeatable surface nanomachining for nanochannels on silicon substrates
Atomic force microscopy based repeatable surface nanomachining for nanochannels on silicon substrates
Atomic force microscopy based repeatable surface nanomachining for nanochannels on silicon substrates
Dong, Z. (author) / Wejinya, U. C. (author)
APPLIED SURFACE SCIENCE ; 258 ; 8689-8695
2012-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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