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    Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers

    New search for: Wang, P.
    New search for: Du, H.
    New search for: Shen, S.
    New search for: Zhang, M.
    New search for: Liu, B.

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    Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers

    New search for: Wang, P.
    New search for: Du, H.
    New search for: Shen, S.
    New search for: Zhang, M.
    New search for: Liu, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers

    New search for: Wang, P.
    New search for: Du, H.
    New search for: Shen, S.
    New search for: Zhang, M.
    New search for: Liu, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Deposition, characterization and optimization of zinc oxide thin film for piezoelectric cantilevers

    Contributors:

    Wang, P. (author) / Du, H. (author) / Shen, S. (author) / Zhang, M. (author) / Liu, B. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 258 ; 9510-9517

    Publication date:

    2012-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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