Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering: Fid-Bau Portal

Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering

Meng, X. / Yang, C. / Chen, Q. / Gao, Y. / Yang, J.

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Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering

Meng, X. / Yang, C. / Chen, Q. / Gao, Y. / Yang, J.

Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering

Meng, X. / Yang, C. / Chen, Q. / Gao, Y. / Yang, J.

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Document information

Title:

Preparation of highly c-axis oriented AlN films on Si substrate with ZnO buffer layer by the DC magnetron sputtering

Contributors:

Meng, X. (author) / Yang, C. (author) / Chen, Q. (author) / Gao, Y. (author) / Yang, J. (author)

Published in:

MATERIALS LETTERS ; 90 ; 49-52

Publication date:

2013-01-01

Size:

4 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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