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Role of oxide thickening in fatigue crack initiation in LIGA nickel MEMS thin films
Role of oxide thickening in fatigue crack initiation in LIGA nickel MEMS thin films
Role of oxide thickening in fatigue crack initiation in LIGA nickel MEMS thin films
Shan, W. L. (author) / Yang, Y. (author) / Hillie, K. T. (author) / Jordaan, W. A. (author) / Soboyejo, W. O. (author)
MATERIALS SCIENCE AND ENGINEERING A ; 561 ; 434-440
2013-01-01
7 pages
Article (Journal)
English
DDC:
620.11
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