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Argon Plasma Decomposition of Porogen in Mesoporous Silica Films Studied by Positron Annihilation
Argon Plasma Decomposition of Porogen in Mesoporous Silica Films Studied by Positron Annihilation
Argon Plasma Decomposition of Porogen in Mesoporous Silica Films Studied by Positron Annihilation
He, C.Q. (author) / Ito, K. (author) / Oka, T. (author) / Kobayashi, Y. (author) / Ohdaira, T. (author) / Suzuki, R. (author) / Kristiak, J. / Kuriplach, J. / Pujari, P.K.
2013-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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