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    Defect Detection in Optical Disk Substrate by Mach-Zehnder Interferometer

    New search for: Takahashi, Y.
    New search for: Morishima, K.
    New search for: Yokota, M.
    New search for: Hosaka, S.

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    Defect Detection in Optical Disk Substrate by Mach-Zehnder Interferometer

    New search for: Takahashi, Y.
    New search for: Morishima, K.
    New search for: Yokota, M.
    New search for: Hosaka, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Defect Detection in Optical Disk Substrate by Mach-Zehnder Interferometer

    New search for: Takahashi, Y.
    New search for: Morishima, K.
    New search for: Yokota, M.
    New search for: Hosaka, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Defect Detection in Optical Disk Substrate by Mach-Zehnder Interferometer

    Contributors:

    Takahashi, Y. (author) / Morishima, K. (author) / Yokota, M. (author) / Hosaka, S.

    Published in:

    Advanced Micro-Device Engineering III ; 149-153

    KEY ENGINEERING MATERIALS ; 534

    Publication date:

    2013-01-01

    Size:

    5 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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