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    Fabrication of Hole-Type Microcantilevers Using FIB and its Evaluations

    New search for: Truong, A.H.
    New search for: Sone, H.
    New search for: Kawakami, T.
    New search for: Hosaka, S.
    New search for: Hosaka, S.

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    Fabrication of Hole-Type Microcantilevers Using FIB and its Evaluations

    New search for: Truong, A.H.
    New search for: Sone, H.
    New search for: Kawakami, T.
    New search for: Hosaka, S.
    New search for: Hosaka, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Fabrication of Hole-Type Microcantilevers Using FIB and its Evaluations

    New search for: Truong, A.H.
    New search for: Sone, H.
    New search for: Kawakami, T.
    New search for: Hosaka, S.
    New search for: Hosaka, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Fabrication of Hole-Type Microcantilevers Using FIB and its Evaluations

    Contributors:

    Truong, A.H. (author) / Sone, H. (author) / Kawakami, T. (author) / Hosaka, S. (author) / Hosaka, S.

    Published in:

    Advanced Micro-Device Engineering III ; 251-256

    KEY ENGINEERING MATERIALS ; 534

    Publication date:

    2013-01-01

    Size:

    6 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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