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Preparation and Characterization of Deposited Tetraethylorthosilicate-SiO~2/SiC MIS Structure
Preparation and Characterization of Deposited Tetraethylorthosilicate-SiO~2/SiC MIS Structure
Preparation and Characterization of Deposited Tetraethylorthosilicate-SiO~2/SiC MIS Structure
Hemmi, M. (author) / Sakai, T. (author) / Yamakami, T. (author) / Hayashibe, R. (author) / Kamimura, K. (author) / Lebedev, A.A. / Davydov, S.Y. / Ivanov, P.A. / Levinshtein, M.E.
2013-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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