Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array: Fid-Bau Portal

Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array

Wang, W. C. / Tian, Y. T. / Li, K. / Lu, E. Y. / Gong, D. S. / Li, X. J.

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Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array

Wang, W. C. / Tian, Y. T. / Li, K. / Lu, E. Y. / Gong, D. S. / Li, X. J.

Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array

Wang, W. C. / Tian, Y. T. / Li, K. / Lu, E. Y. / Gong, D. S. / Li, X. J.

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Document information

Title:

Capacitive humidity-sensing properties of Zn2SiO4 film grown on silicon nanoporous pillar array

Contributors:

Wang, W. C. (author) / Tian, Y. T. (author) / Li, K. (author) / Lu, E. Y. (author) / Gong, D. S. (author) / Li, X. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 273 ; 372-376

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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