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Nanometer scale chemistry and microstructure of CrN/AlN multilayer films

Lin, J. / Henderson, H. B. / Manuel, M. V. / Sproul, W. D.

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Nanometer scale chemistry and microstructure of CrN/AlN multilayer films

Lin, J. / Henderson, H. B. / Manuel, M. V. / Sproul, W. D.

Nanometer scale chemistry and microstructure of CrN/AlN multilayer films

Lin, J. / Henderson, H. B. / Manuel, M. V. / Sproul, W. D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Nanometer scale chemistry and microstructure of CrN/AlN multilayer films

Contributors:

Lin, J. (author) / Henderson, H. B. (author) / Manuel, M. V. (author) / Sproul, W. D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 274 ; 392-396

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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