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Initial reaction of silicon precursors with a varying number of dimethylamino ligands on a hydroxyl-terminated silicon (001) surface
Initial reaction of silicon precursors with a varying number of dimethylamino ligands on a hydroxyl-terminated silicon (001) surface
Initial reaction of silicon precursors with a varying number of dimethylamino ligands on a hydroxyl-terminated silicon (001) surface
Jeong, Y. C. (author) / Baek, S. B. (author) / Kim, D. H. (author) / Kim, J. S. (author) / Kim, Y. C. (author)
APPLIED SURFACE SCIENCE ; 280 ; 207-211
2013-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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