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Analysis of Fabrication Errors on Micro-Spring's Elastic Coefficient

Shu, X. / Lou, W.Z. / Zhao, Y. / Guo, M.G. / Fu, Y. / Wang, Y.

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Analysis of Fabrication Errors on Micro-Spring's Elastic Coefficient

Shu, X. / Lou, W.Z. / Zhao, Y. / Guo, M.G. / Fu, Y. / Wang, Y.

Analysis of Fabrication Errors on Micro-Spring's Elastic Coefficient

Shu, X. / Lou, W.Z. / Zhao, Y. / Guo, M.G. / Fu, Y. / Wang, Y.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Analysis of Fabrication Errors on Micro-Spring's Elastic Coefficient

Contributors:

Shu, X. (author) / Lou, W.Z. (author) / Zhao, Y. (author) / Guo, M.G. (author) / Fu, Y. (author) / Wang, Y. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 3-7

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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